Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures

This paper presents a zeroth and first order perturbative analysis of prestressed electrostatic actuated Microelectromechanical systems (MEMS). Perturbation theory is used to calculate the deflection profile various MEMS structures, from which pull-in voltage estimated using weighed residual method, where both Galerkin expression Dirac delta function have been as weight functions. A circular Capacitative Micromachined Ultrasonic Transducer (CMUT) main example in this paper. device modeled clamped plate subjected an pressure. The calculated has compared with experimental data highly CMUTs, relative error between -36% -8% observed for model that does not include stress. includes stress lowers range values -5% 21%. To improve accuracy estimate Richardson extrapolation estimates. models are Finite Element Model (FEM), overestimation, high regime, 10% model, less than 5% method 3% extrapolation. [2020-0358]